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KLA KLA 5105 Precision Measurement Module for Industrial Automation

The KLA KLA 5105 is a high-performance programmable logic controller designed for industrial automation applications. It offers advanced control capabilities and robust reliability in harsh environments.

Manufacturer:KLA Corporation

Model:KLA 5105

Type:Advanced Inspection Module

Application:Semiconductor Wafer Inspection

Detection Capability:Sub-50nm Defects

Resolution:High Resolution Imaging

Software:Integrated Inspection Software Suite

Inspection Rate:Up to 200 wafers per hour

Dimensions:Width: 60cm, Height: 120cm, Depth: 80cm

Weight:Approximately 500kg

Power Requirements:220V AC, 50/60Hz

Operating Environment:Temperature: 18°C to 25°C, Humidity: 20% to 80%

    The KLA KLA 5105 Advanced Inspection Module is a cutting-edge solution for semiconductor wafer inspection. Designed for precision and reliability, this module offers sub-50nm defect detection capabilities essential for modern semiconductor manufacturing. With high-resolution imaging, it ensures that even the smallest defects are identified and corrected, enhancing overall wafer quality. The integrated inspection software suite provides a comprehensive analysis platform, allowing technicians to monitor and optimize the inspection process efficiently. Operating at up to 200 wafers per hour, the KLA 5105 is built to handle high-volume production environments. Its robust design, weighing approximately 500kg, is built to withstand the rigorous demands of continuous operation. The KLA 5105 operates within a specific environmental range, requiring 220V AC power and ensuring stable performance under controlled conditions. Ideal for semiconductor fabrication facilities, this module is a vital tool for maintaining high standards of quality and efficiency.

KLA KLA 5105

KLA KLA 5105

KLA KLA 5105




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